CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 2 (2) : 19020204 2019
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Development and Prospect of Process Models and Simulation Methods for Atomic Layer Deposition
Lei Qu, Rui Chen, Xiaoting Li, Jing Zhang, Yanrong Wang, Shuhua Wei, Jiang Yan, Yayi Wei
： 2019 - 05 - 23
： 2019 - 06 - 26
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Journal of Microelectronic Manufacturing

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