CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 1 (2) : 18010203 2018
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Variational Level-set Formulation for Lithographic Source and Mask Optimization
Yijiang Shen, Zhenrong Zhang
： 2018 - 11 - 20
： 2018 - 12 - 20
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Journal of Microelectronic Manufacturing

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