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Vol 3 (4) : 20030406 2020
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Material Modeling in Semiconductor Process Applications
Boris A. Voinov
,
Patrick H. Keys
,
Stephen M. Cea
,
Ananth P. Kaushik
,
Mark A. Stettler
DOI:
10.33079/jomm.20030406
: 2020 - 10 - 01
: 2020 - 11 - 02
: 2020 - 12 - 30
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