CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 2 (1) : 19020103 2019
Download
Nitridation-Etch of Silicon Oxide in Fluorocarbon/Nitrogen Plasma: A Computational Study
Du Zhang, Yu-Hao Tsai, Hojin Kim, Mingmei Wang
： 2019 - 02 - 21
： 2019 - 03 - 22
4053 89 0
CSCD  ·  Badiu Scholar
References
Journal of Microelectronic Manufacturing

  • Copyright@JoMMPublish