CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 1 (1) : 18010103 2018
Download
A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes
Yansong Liu, Chao Zhao, Lisong Dong, Rui Chen, Yayi Wei
： 2018 - 08 - 22
： 2018 - 09 - 30
2397 28 0
CSCD  ·  Badiu Scholar
References
Journal of Microelectronic Manufacturing

  • Copyright@JoMMPublish