CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 3 Vol 1 (2) : 18010202 2018
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Compressive Sensing Approaches for Lithographic Source and Mask Joint Optimization
Xu Ma, Zhiqiang Wang, Gonzalo R. Arce
： 2018 - 11 - 26
： 2018 - 12 - 13
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Journal of Microelectronic Manufacturing

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