@Article{jomm.20030301,
AUTHOR = {Xianqiang Zheng; Xu Ma; Shengen Zhang; Yihua Pan; Gonzalo R. Arce},
TITLE = {Study of Inverse Lithography Approaches based on Deep Learning},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030301},
URL = {http://www.jommpublish.org/p/183/55/},
DOI = {10.33079/jomm.20030301}
}