TY - JOUR Pengpeng Yuan; Taian Fan; Yaobin Feng; Peng Xu; Yayi WeiT1 - Machine Learning based Optical Proximity Correction Techniques JO - Journal of Microelectronic Manufacturing VL - 3 Y1 - 2020/12/30 UR - http://www.jommpublish.org/p/55/67/ L1 - http://www.jommpublish.org/jomm_data/publish/A6/D1/0D/365B63451880A64E3E984F4AF9/10.33079.jomm.20030408.pdf DO - 10.33079/jomm.20030408 ER -