TY - JOUR Xiaoye Ding; Sicong Wang; Yi Zhou; Yanzhong Ma; Le Yang; Chi ChenT1 - White Light Interference Solution for Novel 3D NAND VIA Dishing Metrology JO - Journal of Microelectronic Manufacturing VL - 2 Y1 - 2019/12/25 UR - http://www.jommpublish.org/p/183/42/ L1 - http://www.jommpublish.org/jomm_data/publish/68/50/E8/E4FB114A77BAA96BB9362DC305/10.33079.jomm.19020407.pdf DO - 10.33079/jomm.19020407 ER -