TY - JOUR Lithotechsolutions.orgT1 - Current Status of the Integrated Circuit Industry in China ― IC Special Equipment Industry JO - Journal of Microelectronic Manufacturing VL - 2 Y1 - 2019/03/29 UR - http://www.jommpublish.org/p/183/26/ L1 - http://www.jommpublish.org/jomm_data/publish/68/72/DB/2A30F246BDB8AA306119144B51/10.33079.jomm.19020105.pdf DO - 10.33079/jomm.19020105 ER -