@Article{jomm.20030408, AUTHOR = {Pengpeng Yuan; Taian Fan; Yaobin Feng; Peng Xu; Yayi Wei}, TITLE = {Machine Learning based Optical Proximity Correction Techniques}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030408}, URL = {http://www.jommpublish.org/p/55/67/}, DOI = {10.33079/jomm.20030408} }