@Article{jomm.20030410, AUTHOR = {Chenmin Hu; Khurram Zafar; Abhishek Vikram; Geoffrey Ying}, TITLE = {Pattern-Centric Computational System for Logic and Memory Manufacturing and Process Technology Development}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030410}, URL = {http://www.jommpublish.org/p/55/62/}, DOI = {10.33079/jomm.20030410} }