@Article{jomm.20030304, AUTHOR = {Litho World}, TITLE = {Recent Progress of the Integrated Circuit Industry in China ― Overview of the Manufacturing Industry}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030304}, URL = {http://www.jommpublish.org/p/183/58/}, DOI = {10.33079/jomm.20030304} }