@Article{jomm.20030301, AUTHOR = {Xianqiang Zheng; Xu Ma; Shengen Zhang; Yihua Pan; Gonzalo R. Arce}, TITLE = {Study of Inverse Lithography Approaches based on Deep Learning}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030301}, URL = {http://www.jommpublish.org/p/183/55/}, DOI = {10.33079/jomm.20030301} }