@Article{jomm.20030105, AUTHOR = {Yu Ding; Yongfeng Cao; Xin Luo; Enming Shang; Shaojian Hu; Shoumian Chen; Yuhang Zhao}, TITLE = {A Device Design for 5 nm Logic FinFET Technology}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030105}, URL = {http://www.jommpublish.org/p/183/50/}, DOI = {10.33079/jomm.20030105} }