@Article{jomm.19020408, AUTHOR = {Qiang Wu; Yanli Li; Yushu Yang; Yuhang Zhao}, TITLE = {A Photolithography Process Design for 5 nm Logic Process Flow}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {2}, YEAR = {2019}, PAGES = {19020408}, URL = {http://www.jommpublish.org/p/183/41/}, DOI = {10.33079/jomm.19020408} }