@Article{jomm.18010102, AUTHOR = {Yu-Hao Tsai; Du Zhang; Mingmei Wang}, TITLE = {Silicon Nitride Etch via Oxidation Reaction in Fluorocarbon/Oxygen Plasma: A First-Principle Study}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {1}, YEAR = {2018}, PAGES = {18010102}, URL = {http://www.jommpublish.org/p/183/14/}, DOI = {10.33079/jomm.18010102} }